水冷裝置：真空熱處理爐的爐殼、爐蓋、電熱元件、水冷電、中間真空隔熱門等部件，均在真空、受熱狀態下工作。在這種為不利的條件下工作，必須保證各部件的結構不變形、不損壞，真空密封圈不過熱、不燒毀。因此，各部件應該根據不同的情況設置水冷裝置，以保證真空熱處理爐能夠正常運行并有足夠的利用壽命。
      采(cai)用低電(dian)(dian)(dian)壓大電(dian)(dian)(dian)流：真(zhen)(zhen)空容(rong)器內(nei)(nei)，當真(zhen)(zhen)空空度(du)為幾托一(yi)lxlo-1托的(de)(de)(de)范(fan)圍內(nei)(nei)時(shi)(shi)，真(zhen)(zhen)空容(rong)器內(nei)(nei)的(de)(de)(de)通電(dian)(dian)(dian)導體在(zai)較高(gao)的(de)(de)(de)電(dian)(dian)(dian)壓下，會(hui)產(chan)生(sheng)(sheng)輝(hui)光(guang)(guang)(guang)(guang)放電(dian)(dian)(dian)現(xian)象。在(zai)真(zhen)(zhen)空熱(re)(re)處理(li)爐(lu)內(nei)(nei)，嚴重(zhong)(zhong)的(de)(de)(de)弧光(guang)(guang)(guang)(guang)放電(dian)(dian)(dian) 會(hui)燒毀電(dian)(dian)(dian)熱(re)(re)元件(jian)、隔熱(re)(re)層等，造成重(zhong)(zhong)大事故和損失(shi)。因此(ci)，真(zhen)(zhen)空熱(re)(re)處理(li)爐(lu)的(de)(de)(de)電(dian)(dian)(dian)熱(re)(re)元件(jian)的(de)(de)(de)工作(zuo)電(dian)(dian)(dian)壓一(yi)般都(dou)不超過80一(yi)100伏。同時(shi)(shi)在(zai)電(dian)(dian)(dian)熱(re)(re)元件(jian)結構設計時(shi)(shi)要采(cai)取有效辦法，如盡量避免有的(de)(de)(de)部件(jian)，電(dian)(dian)(dian)間的(de)(de)(de)間距(ju)不能太(tai)小，以(yi)防止輝(hui)光(guang)(guang)(guang)(guang)放電(dian)(dian)(dian)或(huo)者弧光(guang)(guang)(guang)(guang)放電(dian)(dian)(dian)的(de)(de)(de)產(chan)生(sheng)(sheng)。